This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad be...view more

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    • Standard
      53 pages
      English language

ISO 20579-4:2018 identifies information to be reported in a datasheet, certificate of analysis, report or other publication regarding the handling of nano-objects in preparation for surface chemical analysis. This information is needed to ensure reliability and reproducibility of analyses needed to advance research and technology using these materials, and for obtaining appropriate understanding of potential nano-object environmental and biological impacts. Such information is in addition to oth...view more

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    • Standard
      23 pages
      English language

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed ...view more

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    • Technical report
      116 pages
      English language

ISO 16242:2011 specifies the minimum level of information to be reported by the analyst following the analysis of a test specimen using Auger electron spectroscopy (AES). It includes information that is to be recorded on or in the analytical record.

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    • Standard
      10 pages
      English language
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    • Standard
      10 pages
      French language

ISO 16243:2011 specifies the minimum level of information to be reported by the analyst following the analysis of a test specimen using X‑ray photoelectron spectroscopy (XPS). It includes information that is to be recorded on or in the analytical record.

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    • Standard
      9 pages
      French language
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    • Standard
      9 pages
      English language

ISO/TR 16268:2009 specifies a procedure for the certification of the areic dose of an ion-implanted analyte element of atomic number larger than that of silicon retained in a working reference material (WoRM) intended for surface-analytical use. The WoRM is in the form of a polished (or similarly smooth-faced) wafer (also referred to as the host), of uniform composition and nominal diameter 50 mm or more, that has been ion-implanted with nominally one isotope of a chemical element (also referred...view more

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    • Technical report
      19 pages
      English language

ISO 18117:2009 gives guidance on the handling of and the containers for specimens submitted for surface chemical analysis. It is intended for the user of surface analysis services as an aid in understanding the special sample handling requirements of surface chemical analysis techniques, particularly the following: Auger electron spectroscopy (AES), secondary-ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS or ESCA). The protocols presented may also be applicable to other a...view more

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    • Standard
      9 pages
      French language
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    • Standard
      9 pages
      English language
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    • Standard
      9 pages
      French language
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    • Standard
      9 pages
      English language
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    • Draft
      8 pages
      English language
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    • Draft
      12 pages
      English language

ISO 18116:2005 gives guidance on methods of mounting and surface treatment for a specimen about to undergo surface chemical analysis. It is intended for the analyst as an aid in understanding the specialized specimen-handling conditions required for analyses by techniques such as Auger electron spectroscopy, secondary-ion mass spectrometry, and X-ray photoelectron spectroscopy.

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    • Standard
      16 pages
      English language
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    • Standard
      17 pages
      French language