ISO 15470:2004

INTERNATIONAL ISO
STANDARD 15470
First edition
2004-05-01

Surface chemical analysis — X-ray
photoelectron spectroscopy —
Description of selected instrumental
performance parameters
Analyse chimique des surfaces — Spectroscopie de
photoélectrons X — Description de certains paramètres relatifs à
la performance instrumentale




Reference number
ISO 15470:2004(E)
©
ISO 2004

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ISO 15470:2004(E)
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ii © ISO 2004 – All rights reserved

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ISO 15470:2004(E)
Contents Page
Foreword. iv
Introduction . v
1 Scope. 1
2 Normative references . 1
3 Terms and definitions. 1
4 Symbols and abbreviations . 1
5 Description of selected instrumental performance parameters . 1
5.1 Method of analysis. 1
5.2 Samples. 1
5.3 System configuration . 2
5.4 X-ray source . 2
5.5 Spectrometer intensity performance and energy resolution . 2
5.6 Spectrometer energy scale . 2
5.7 Spectrometer intensity linearity . 3
5.8 Spectrometer response function. 3
5.9 Imaging and selected area resolution. 3
5.10 Charge neutralization . 4
5.11 Angle-resolved XPS. 4
5.12 Vacuum environment. 4

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ISO 15470:2004(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
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International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 15470 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee
SC 7, X-ray photoelectron spectroscopy.
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ISO 15470:2004(E)
Introduction
X-ray photoelectron spectrometers are produced by many manufacturers throughout the world. While the
basic principle of the XPS analytical method in each instrument is the same, the specific designs of the
instruments and the way that performance specifications are provided differ widely. As a result, it is often
difficult to compare the performance of instruments from one manufacturer with those from another. This
International Standard provides a basic list of items devised to enable all X-ray photoelectron spectrometers to
be described in a common manner. This International Standard is not intended to replace the manufacturer’s
specification, which may extend to 30 or more pages. It is intended that, where certain items are defined in
that specification, there is an agreed and defined meaning to that item.

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INTERNATIONAL STANDARD ISO 15470:2004(E)

Surface chemical analysis — X-ray photoelectron
spectroscopy — Description of selected instrumental
performance parameters
1 Scope
This International Standard describes the way in which specific aspects of the performance of an X-ray
photoelectron spectrometer shall be described.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
ISO 18115, Surface chemical analysis — Vocabulary
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 18115 apply.
4 Symbols and abbreviations
FWHM full width at half maximum
XPS X-ray photoelectron spectroscopy
5 Description of selected instrumental performance parameters
5.1 Method of analysis
A short description of the methods used to obtain information from the sample shall be given, and the
availability (as an option) of other analytical techniques in the system under consideration shall be stated.
5.2 Samples
The size and shape of samples that may be analysed with the instrument performing to specification shall be
given. If the size or shape is restricted for particular modes of analysis, e.g. angle-resolved measurements,
measurements for insulators, etc., this shall be specified.
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ISO 15470
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