ISO/TS 25138:2019

TECHNICAL ISO/TS
SPECIFICATION 25138
Second edition
2019-08
Surface chemical analysis — Analysis
of metal oxide films by glow-discharge
optical-emission spectrometry
Analyse chimique des surfaces — Analyse de films d'oxyde de métal
par spectrométrie d'émission optique à décharge luminescente
Reference number
ISO/TS 25138:2019(E)
©
ISO 2019

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ISO/TS 25138:2019(E)

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ISO/TS 25138:2019(E)

Contents Page
Foreword .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Principle . 2
5 Apparatus . 2
5.1 Glow-discharge optical-emission spectrometer . 2
5.1.1 General. 2
5.1.2 Selection of spectral lines . 2
5.1.3 Selection of glow-discharge source type . 3
6 Adjusting the glow-discharge spectrometer system settings . 4
6.1 General . 4
6.2 Setting the parameters of a DC source . 4
6.2.1 Constant applied current and voltage . 4
6.2.2 Constant applied current and pressure . 5
6.2.3 Constant voltage and pressure . 6
6.3 Setting the discharge parameters of an RF source . . 6
6.3.1 General. 6
6.3.2 Constant applied voltage and pressure . 6
6.3.3 Constant applied power and DC bias voltage . 7
6.3.4 Constant effective power and RF voltage .
...